Observation of blue shifts in ZnO/ZnMgO multiple quantum well structures by ion-implantation induced intermixing

Abstract

Implantation with low-energy (80 keV) oxygen ions and subsequent rapid thermal annealing at 800 °C are used to induce intermixing in a stack of 19 ZnO/Zn0.7Mg0.3O multiple quantum wells grown on sapphire by molecular beam epitaxy. Large blue shifts of mo