Concepedia

Possibilities of X-Ray Interfernce Diffractometry for the Investigation of Ion-Doped Layers

V. V. Aristov, V.N. Mordkovich, A. Yu. Nikulin, A. A. Snigirev, U. J. Winter, Yu. N. Erokhin, P. Zaumseil

physica status solidi (a) · 1990 · 11 citations · 3 references

DOI

Concepts

References

3

Characterization of lattice damage in ion implanted silicon by multiple crystal x-ray diffraction

M. Servidori · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 49 citations

, , +14

Experimental investigation of X-ray Bragg diffraction on the periodic surface relief of a perfect crystal

V. V. Abistov, A. Yu. Nikulin, A. Snigirev et al. · physica status solidi (a) · 1986 · 18 citations

, , +17

Interference thickness oscillations of an X-ray wave on periodically profiled silicon

V. V. Aristov, U. J. Winter, A. Yu. Nikulin et al. · physica status solidi (a) · 1988 · 14 citations

, , +16