Fabrication of microfluidic devices using MeV ion beam Programmable Proximity Aperture Lithography (PPAL)

Sergey Gorelick, Nitipon Puttaraksa, Timo Sajavaara, Mikko Laitinen, S. Singkarat, Harry J. Whitlow

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2008 · 20 citations · 18 references

Concepts

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