Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films - Concepedia

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Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films

10

Citations

20

References

2006

Year

Junqi Xu, Hiroyuki Kousaka, Noritsugu Umehara, Dongfeng Diao

Surface and Coatings Technology

References

	Year	Citations

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