Damage induced during channeling measurements with a nuclear microprobe

Specimen damage by nuclear microbeams and its avoidance

J.A. Cookson · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 57 citations

Engineering, Nuclear Engineering, Physics +14

Microanalysis by Focused MeV Helium Ion Beam

Mikio Takai, Kouji Matsunaga, K. Inoue et al. · Japanese Journal of Applied Physics · 1987 · 34 citations

Natural Sciences, Materials Science, Physics +11

Ion microbeam applications in semiconductors

J. S. Williams, Jeffrey C. McCallum, Richard A. Brown · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 25 citations

Engineering, Electrical Engineering, Materials Science +11

Focused MeV beam line for microanalysis at Osaka

M. Takai, A. Kinomura, K. Inoue et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 23 citations

Engineering, Physics, Instrumentation +5

Microbeam line with 1.5 MeV helium ions and protons at Osaka

K. Inoue, M. Takai, K. Matsunaga et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 20 citations

Natural Sciences, Nuclear Engineering, Physics +8