Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 23 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsMicrofabricationSemiconductor DevicesCurrent-voltage CharacteristicsMicrofabrication ProcessesNanoelectronicsCurrent-voltage RelationsEmission UniformityNanofabrication Of Nanoelectronic DevicesPotential - Current Characteristics
The current–voltage characteristics can vary significantly between individual microfabricated tips in as-fabricated arrays of cold cathodes. Such emission nonuniformity is undesirable in device applications. We have shown that in situ tip self-heating by the emitted electron current can be used to make the current–voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity will allow for more reliable array operation at increased electron emission current densities.
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Physical properties of thin-film field emission cathodes with molybdenum cones
C.A. Spindt, I. Brodie, L. M. Humphrey et al. · Journal of Applied Physics · 1976 · 1.5K citations