Concepedia

Sputter-deposited WBx films

J. Willer, S Pompl, D. Ristow

Thin Solid Films · 1990 · 13 citations · 6 references

DOI

References

6

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

, , +17

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

, , +10

Rapidly quenched metals

Jaroslav Šesták · Thermochimica Acta · 1986 · 330 citations

Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source

David W. Hoffman, John A. Thornton · Journal of Vacuum Science and Technology · 1982 · 256 citations

, , +17

Determination of Stress in Films on Single Crystalline Silicon Substrates

R. Glang, R. A. Holmwood, R. Rosenfeld · Review of Scientific Instruments · 1965 · 135 citations

, , +17