Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser - Concepedia

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Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser

41

Citations

9

References

2013

Year

Jungjae Park, Jonghan Jin, Jae Wan Kim, Jong-Ahn Kim

Optics Communications

PhotonicsAdvanced Laser ProcessingOptical MaterialsEngineeringOptical PropertiesApplied PhysicsThickness ProfileOptical CombLaser Processing TechnologyRefractive Index VariationOptoelectronicsElectro-optics Device

References

	Year	Citations

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