Experimental study of atmospheric pressure chemical vapor deposition of silicon carbide from methyltrichlorosilane

Chemistry and industry

W. J. U. Woolcock · Journal of the Society of Chemical Industry · 1924 · 885 citations

Vapor-Phase Fabrication and Properties of Continuous-Filament Ceramic Composites

Theodore M. Besmann, Brian W. Sheldon, R.A. Lowden et al. · Science · 1991 · 317 citations

Natural Sciences, Materials Engineering, Materials Science +17

The structure of chemical vapor deposited silicon carbide

Jia Min Chin, P. Gantzel, Robert Hudson · Thin Solid Films · 1977 · 158 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Theoretical study of thermochemistry of molecules in the silicon-carbon-chlorine-hydrogn system

Mark D. Allendorf, Carl F. Melius · The Journal of Physical Chemistry · 1993 · 123 citations

Natural Sciences, Chemistry, Organic Chemistry +7

Structure/property/process relationships in chemical vapor deposition CVD

J.M. Blocher · Journal of Vacuum Science and Technology · 1974 · 117 citations

Engineering, Materials Engineering, Materials Science +17