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Chemical effects in chemical mechanical planarization of TaN: investigation of surface reactions in a peroxide-based alkaline slurry using Fourier transform impedance spectroscopy

Materials ScienceChemical EngineeringEngineeringCorrosionSurface ChemistrySurface SciencePeroxide-based Alkaline SlurrySurface ReactivityPhysical ChemistryInterfacial PhenomenaChemical EffectsSurface TreatmentChemistryChemical KineticsChemical Mechanical PlanarizationSurface Processing