Applied Physics B · 1989 · 28 citations · 15 references
Natural SciencesChemical EngineeringChemistryOrganometallic ChemistryPhotonicsSpectroscopyLaser SpectroscopyOptical SpectroscopyPhotochemistryLaser PhotochemistryLaser PhotolysisPhotolysisPhotolysis Processes
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Ion-surface interactions in plasma etching
J. W. Coburn, Harold F. Winters, T. J. Chuang · Journal of Applied Physics · 1977 · 216 citations
Focused ion beam induced deposition of gold
G. M. Shedd, Henri J. Lezec, A. D. Dubner et al. · Applied Physics Letters · 1986 · 121 citations