Journal of Electronic Materials · 1990 · 27 citations · 2 references
Materials EngineeringOzone/organic-source ApcvdChemical EngineeringEngineeringOxide ElectronicsChemistryThin FilmsChemical Vapor Deposition
2
Process and film characterization of low pressure tetraethylorthosilicate–borophosphosilicate glass
Frank Becker, D. A. Pawlik, H. Schäfer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 67 citations
Materials Engineering, Materials Science, Teos–bpsg Layers +13