Concepedia

The effects of deposition variables on deposition rate in the chemical vapour deposition of silicon nitride

Kyoung‐Soo Yi, Ji-Bum Kim, Kwang-Joon Kim, John S. Chun

Thin Solid Films · 1987 · 10 citations · 12 references

DOI

Concepts

References

12

Characterization of Silicon Nitride Films

E. A. Taft · Journal of The Electrochemical Society · 1971 · 211 citations

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Chemical vapour-deposited silicon nitride

Koichi Niihara, Toshio Hirai · Journal of Materials Science · 1976 · 125 citations

, , +11

Properties of Amorphous Silicon Nitride Films

S. M. Hu · Journal of The Electrochemical Society · 1966 · 104 citations

, , +17

Electrical Properties of Vapor-Deposited Silicon Nitride and Silicon Oxide Films on Silicon

B. E. Deal, P. J. Fleming, P. L. Castro · Journal of The Electrochemical Society · 1968 · 102 citations

, , +17

The Preparation and Properties of Amorphous Silicon Nitride Films

T. L. Chu, C. H. Lee, G. A. Gruber · Journal of The Electrochemical Society · 1967 · 89 citations · Full text

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