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Effect of deposition temperature on the microstructure and surface morphology of c-axis oriented AlN films deposited on sapphire substrate by RF reactive magnetron sputtering

Materials ScienceMaterials EngineeringAln FilmsAluminium NitrideEngineeringSurface ScienceApplied PhysicsChemical DepositionSurface MorphologyDeposition TemperatureChemical Vapor DepositionThin Film ProcessingMicrostructure