Concepedia

Effect of deposition temperature on the microstructure and surface morphology of c-axis oriented AlN films deposited on sapphire substrate by RF reactive magnetron sputtering

Xu-Ping Kuang, Huayu Zhang, Gui‐Gen Wang, Lin Cui, Can Zhu, Lei Jin, Rui Sun, Jiecai Han

Superlattices and Microstructures · 2012 · 44 citations · 30 references

DOI

Concepts

References

30

Nitride-based semiconductors for blue and green light-emitting devices

F. A. Ponce, D. P. Bour · Nature · 1997 · 1.7K citations

, , +14

Substrates for gallium nitride epitaxy

L. Liu, James H. Edgar · Materials Science and Engineering R Reports · 2002 · 809 citations

, , +12

Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes

Hideki Hirayama · Journal of Applied Physics · 2005 · 352 citations

, , +17

XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy

L. W. Rosenberger, Ronald J. Baird, Erik McCullen et al. · Surface and Interface Analysis · 2008 · 338 citations

, , +17

Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering

Xiaohong Xu, Hai‐Shun Wu, Congjie Zhang et al. · Thin Solid Films · 2001 · 255 citations

, , +16