Concepedia

Direct patterning of gold oxide thin films by focused ion-beam irradiation

F. Machalett, Klaus Edinger, J. Melngailis, Marco Diegel, K. Steenbeck, E. Steinbeiß

Applied Physics A · 2000 · 30 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsSurface ScienceThin FilmsMetal Oxide NanomaterialsOxide SemiconductorsRadiation Damage In MaterialsThin Film LithographyThin-film DepositionThin-film PatterningFocused Ion Beam LithographyFocused Ion Beam PatterningGold Surface FunctionalizationIon Beam IrradiationIon Beam Surface TreatmentThin Oxide FilmsThin-film Oxides