Effect of H₂ Annealing on a Pt/PbZr_xTi_1-xO₃ Interface Studied by X-Ray Photoelectron Spectroscopy

Abstract

The chemical reaction and the change in the Schottky barrier height at the Pt/PbZr x Ti 1- x O 3 (PZT) interface as a result of annealing was studied by in-vacuo X-ray photoelectron spectroscopy. Annealing at 320° C produced metallic Pb atoms which migrated on the Pt surface. There were more of these atoms when the annealing was done in H 2 than in a vacuum. After H 2 annealing, the core level peaks for the elements in the PZT showed a band bending shift of ∼0.4 V toward higher binding energy, indicating that the n-type Schottky barrier height at the Pt/PZT interface was lowered by the H 2 annealing.