Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 45 citations · 32 references
EngineeringMaterials SciencePhysicsCondensed Matter PhysicsOptoelectronicsSemiconductor MaterialsOptical Properties Of SemiconductorsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor Thin FilmsThin Film Optical PropertiesElectronic CouplingOptical PropertiesPhotoluminescencePhotoluminescence SpectroscopySegregationSemiconductor CharacterizationSemiconductor NanostructuresVertical Segregation
Using cross-sectional scanning tunneling microscopy and photoluminescence spectroscopy, the atomic structure and optical properties of submonolayer depositions of InAs in GaAs are studied. The submonolayer depositions are formed by a cycled deposition of 0.5 monolayers InAs with GaAs spacer layers of different thicknesses between 1.5 and 32 monolayers. The microscopy images exhibit InAs-rich agglomerations with widths around 5 nm and heights of up to 8 monolayers. A lateral agglomeration density in the 1012 cm−2 range is found. During the capping of the InAs depositions a vertical segregation occurs, for which a segregation coefficient of ∼0.73 was determined. In the case of thin GaAs spacer layers, the observed segregation forms vertically connected agglomerations. The photoluminescence spectra exhibit peaks with linewidths below 10 meV and show a considerable dependence of the peak energy on the spacer thickness, even up to 32 monolayers GaAs, indicating a long range electronic coupling.
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Atom-selective imaging of the GaAs(110) surface
R. M. Feenstra, Joseph A. Stroscio, J. Tersoff et al. · Physical Review Letters · 1987 · 613 citations