Thin-film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

Abstract

The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.