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Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor

DOIFull Paper Access

29

Citations

32

References

2013

Year

Matthew J. Smith, Meng‐Ju Sher, Benjamin Franta, Yu‐Ting Lin, Eric Mazur, Silvija Gradečak
Applied Physics A

References

YearCitations

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