Advanced Materials · 2004 · 46 citations · 33 references
Direct PatterningEngineeringNanodevicesNanostructured SurfaceDirect NanopatterningSurface NanotechnologyMolecular FilmsSurface TechnologyMaterials FabricationNanolithographyNanolithography MethodMaterials ScienceNanotechnologyNanomanufacturingNanostructuringSurface NanoengineeringNanomaterialsMicrofabricationMetallic MastersSurface ScienceApplied PhysicsNanofabricationThin FilmsSurface ProcessingNanostructures
A new method for direct patterning of metal surfaces with sub‐50 nm resolution based on molecular films is described (see Figure). Thermal vapor deposition of different metals on chemically surface‐modified nanostructured silicon or metallic masters allows direct pattern transfer and easy film detachment. Patterned metallic surfaces are also used as platforms to grow nanostructured hybrid materials by controlled chemical reactions.
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Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering
Stefan Facsko, T. Dekorsy, C. Koerdt et al. · Science · 1999 · 789 citations · Full text