Solid State Communications · 1991 · 13 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceAnalytical ChemistryElectronic MaterialsMass Spectrometric AnalysisIon ImplantationMass AnalyzersMass SpectrometrySilicon MaterialsIon Implantation EffectsRutherford Backscattering SpectrometryRutherford ScatteringSecondary Ion Mass SpectrometrySilicon Characterization
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Transient annealing for the production of n+ contact layers in GaAs
R. Gwilliam, R. Bensalem, B.J. Sealy et al. · Physica B+C · 1985 · 16 citations