Transient annealing for the production of n+ contact layers in GaAs

Transient annealing of selenium-implanted gallium arsenide using a graphite strip heater

R. L. Chapman, John C. C. Fan, J.P. Donnelly et al. · Applied Physics Letters · 1982 · 46 citations

Engineering, Electrical Engineering, Materials Science +16

AlN capped annealing of Se and Sn implanted semi-insulating GaAs

R. Bensalem, N. J. Barrett, B.J. Sealy · Electronics Letters · 1983 · 26 citations

Engineering, Electrical Engineering, Materials Science +15

Transient annealing of ion implanted GaAs

B.J. Sealy · Microelectronics Journal · 1982 · 23 citations

Engineering, Electrical Engineering, Materials Science +16