Optics Letters · 2006 · 106 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsPhotonicsThin FilmsOptical Thin FilmsPhotonic MaterialsRefractive IndexThin Film Optical PropertiesThin-film MaterialsDistributed Bragg Reflector ResonatorsNanofabrication Of Photonic StructuresRefractive Index EngineeringThin-film Refractive Index
The refractive-index contrast in dielectric multilayer structures, optical resonators, and photonic crystals is an important figure of merit that creates a strong demand for high-quality thin films with a low refractive index. A SiO2 nanorod layer with low refractive index of n = 1.08, to our knowledge the lowest ever reported in thin-film materials, is grown by oblique-angle electron-beam deposition of SiO2. A single-pair distributed Bragg reflector employing a SiO2 nanorod layer is demonstrated to have enhanced reflectivity, showing the great potential of low-refractive-index films for applications in photonic structures and devices.
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Thin film retardation plate by oblique deposition
Tomoyoshi Motohiro, Yasunori Taga · Applied Optics · 1989 · 258 citations
Surface modified spin-on xerogel films as interlayer dielectrics
S. Nitta, V. Pisupatti, A. K. Jain et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 123 citations
Natural Sciences, Materials Engineering, Materials Science +16