Porous silica materials as low-k dielectrics for electronic and optical interconnects

A. K. Jain, Svetlana Rogojevic, S. Ponoth, N. Agarwal, Itty Matthew, W. N. Gill, P. D. Persans, M. Tomozawa, Joel L. Plawsky, E. Simonyi

Thin Solid Films · 2001 · 169 citations · 26 references

Concepts

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