Porous silica materials as low-k dielectrics for electronic and optical interconnects - Concepedia

Concepedia

Publication | Closed Access

Porous silica materials as low-k dielectrics for electronic and optical interconnects

167

Citations

26

References

2001

Year

A. K. Jain, Svetlana Rogojevic, S. Ponoth, N. Agarwal, Itty Matthew, W. N. Gill, P. D. Persans, M. Tomozawa, Joel L. Plawsky, E. Simonyi

Thin Solid Films

Materials ScienceOptical MaterialsOptical InterconnectsElectronic MaterialsEngineeringNanoporous MaterialPorous Silica MaterialsApplied PhysicsSilicenePorositySilicon On InsulatorFunctional MaterialsLow-k Dielectrics

References

	Year	Citations

Page 1

Page 1