Scaling and reliability of NAND flash devices

Abstract

Numerous scaling limitations of NAND flash memory have arisen due to the intrinsic nature of the operational principle of NAND flash memory and those limitations eventually lead to a paradigm shift in the NAND flash technology from the planar cell to the vertical NAND cell. In this paper, the limitations of scaling which induce the evolution of the NAND cell as well as the current trends of NAND technology are reviewed.