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Boron implantations in silicon: A comparison of charge carrier and boron concentration profiles

Electrical EngineeringIon ImplantationEngineeringBoron NitridePhysicsNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsBoron Concentration ProfilesBoron ImplantationsSemiconductor DeviceCharge Carrier