Boron implantations in silicon: A comparison of charge carrier and boron concentration profiles

Electrical Properties of Pure Silicon and Silicon Alloys Containing Boron and Phosphorus

G. L. Pearson, J. Bardeen · Physical Review · 1949 · 909 citations

Engineering, Pure Silicon, Silicon On Insulator +19

Heavily Doped Semiconductors

V.I. Fistul, J. S. Blakemore · American Journal of Physics · 1969 · 503 citations · Full text

Semiconductors, Semiconductor Technology, Electrical Engineering +5

Theory of an Experiment for Measuring the Mobility and Density of Carriers in the Space-Charge Region of a Semiconductor Surface

Richard L. Petritz · Physical Review · 1958 · 484 citations

Engineering, Space-charge Region, Charge Transport +19

Solid Solubility and Diffusion Coefficients of Boron in Silicon

G. L. Vick, K. M. Whittle · Journal of The Electrochemical Society · 1969 · 175 citations

Materials Science, Boron Nitride, Solid Solubility +9

Anodic Formation of Oxide Films on Silicon

Péter Schmidt, W Barsoum Michel · Journal of The Electrochemical Society · 1957 · 123 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +16