Aluminum oxide films made from evaporated sapphire

Characteristics of the Surface-State Charge (Qss) of Thermally Oxidized Silicon

B. E. Deal, Michael C. Sklar, Andrew S. Grove et al. · Journal of The Electrochemical Society · 1967 · 708 citations

Engineering, Materials Engineering, Materials Science +17

Current Transport and Maximum Dielectric Strength of Silicon Nitride Films

Simon M. Sze · Journal of Applied Physics · 1967 · 476 citations

Engineering, Materials Engineering, Materials Science +17

The effects of oxide traps on the MOS capacitance

F.P. Heiman, G. Warfield · IEEE Transactions on Electron Devices · 1965 · 437 citations

Engineering, Electrical Engineering, Materials Science +17

Investigation of thermally oxidised silicon surfaces using metal-oxide-semiconductor structures

Andrew S. Grove, B. E. Deal, E. H. Snow et al. · Solid-State Electronics · 1965 · 416 citations

Engineering, Materials Engineering, Materials Science +14

Potential Distribution and Negative Resistance in Thin Oxide Films

T. W. Hickmott · Journal of Applied Physics · 1964 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +17