Thin Solid Films · 2000 · 38 citations · 12 references
Materials EngineeringMagnetismElectrical EngineeringMaterials ScienceMgo-thin FilmsEngineeringApplied PhysicsMagnesium-based CompositeMagnetron SputteringReactive RfThin FilmsThin Film ProcessingMagnetic Medium
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Magnetron-sputtered superhard materials
S. Ulrich, T. Theel, J. Schwan et al. · Surface and Coatings Technology · 1997 · 99 citations
Recent advances in sputter deposition
B. Window · Surface and Coatings Technology · 1995 · 52 citations