Thin Solid Films · 1993 · 15 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsInorganic ChemistryMaterials ChemistryAtomic Layer DepositionIii-v SemiconductorsSemiconductor SurfacesSurface ModificationSurface PhysicsThin-film MaterialsAtomic Layer Deposition PrecursorsAtomic Layer EpitaxyAtomic Layer EtchingLayer-by-layer GrowthLayered Transition Metal Oxides
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