Sensors and Actuators A Physical · 2014 · 21 citations · 24 references
EngineeringMaterials EngineeringMaterials ScienceMaterials CharacterizationMicrofabricationSensorsAlloysMems CharacterizationMems DesignMems SensorsMicroelectromechanical SensorsSensor MaterialsMems Mechanical SensorsMicrofabricated SensorsMicromachined SensorsShape Memory EffectsShape-memory Alloys
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