Concepedia

Epitaxial lateral overgrowth of AlN on self-assembled patterned nanorods

Michele Conroy, Vitaly Z. Zubialevich, Haoning Li, Nikolay Petkov, Justin D. Holmes, P. J. Parbrook

Journal of Materials Chemistry C · 2014 · 63 citations · 30 references

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Abstract

We report an inexpensive nanoscale patterning process for epitaxial lateral overgrowth (ELOG) in AlN layers grown by metal organic vapour phase epitaxy (MOVPE) on sapphire.

References

30

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