Publication | Open Access
Epitaxial lateral overgrowth of AlN on self-assembled patterned nanorods
63
Citations
30
References
2014
Year
Materials ScienceAluminium NitrideEngineeringNanomaterialsNanotechnologyCrystal Growth TechnologySurface ScienceApplied PhysicsNanostructure SynthesisInexpensive NanoscaleMolecular Beam EpitaxyEpitaxial GrowthAln LayersChemical Vapor DepositionEpitaxial Lateral Overgrowth
We report an inexpensive nanoscale patterning process for epitaxial lateral overgrowth (ELOG) in AlN layers grown by metal organic vapour phase epitaxy (MOVPE) on sapphire.
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