Publication | Closed Access
The effect of helium plasma etching on polymer-based optoelectronic devices
10
Citations
9
References
2009
Year
Materials ScienceElectrical EngineeringOptical MaterialsElectronic DevicesHelium PlasmaEngineeringMicrofabricationOptical PropertiesPlasma ElectronicsElectron-beam LithographyApplied PhysicsBeam LithographyOptoelectronic DevicesPlasma EtchingOptoelectronicsPlasma Processing
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