Concepedia

Nickel pulse reversal plating for image reversal of ultrathin electron beam resist

Y. Awad, Éric Lavallée, Jacques Beauvais, Dominique Drouin, Lau Kien Mun, Yang Pan, M. Cloutier, David Turcotte

Thin Solid Films · 2006 · 11 citations · 13 references

DOI

Concepts

References

13

Mass transfer and electrocrystallization analyses of nanocrystalline nickel production by pulse plating

R. T. C. Choo, J. M. Toguri, A.M. El-Sherik et al. · Journal of Applied Electrochemistry · 1995 · 142 citations

, , +16

Process optimization for production of sub-20 nm soft x-ray zone plates

S. J. Spector, Chris Jacobsen, D. M. Tennant · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 125 citations

, , +13

Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope

C. R. K. Marrian, F. Keith Perkins, Susan L. Brandow et al. · Applied Physics Letters · 1994 · 111 citations

, , +15

Effects of direct current and pulse-plating on the co-deposition of nickel and nanometer diamond powder

Wun-Hsing Lee, Sen-Cheh Tang, Kung-Cheng Chung · Surface and Coatings Technology · 1999 · 90 citations

, , +6

Cross-linked polymers for nanofabrication of high-resolution zone plates in nickel and germanium

Gerd Schneider, T. Schliebe, H. Aschoff · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 86 citations

, , +15