Electron spin resonance study of E' trapping centers in SIMOX buried oxides

Abstract

Electron spin resonance and capacitance versus voltage measurements are combined with vacuum ultraviolet and ultraviolet illumination sequences to study E' centers in a variety of SIMOX buried oxides. The oxides had all been annealed above 1300 degrees C. The results clearly show that E' centers play an important, probably dominating role in the trapping behavior of these oxides. This role is considerably different from the role that E' centers play in thermal oxides.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>