Fluidic interconnects for modular assembly of chemical microsystems

Integrated flow-regulated silicon micropump

Volker Gass, Bart H. van der Schoot, S. Jeanneret et al. · Sensors and Actuators A Physical · 1994 · 74 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11

Silicon Microvalves For Gas Flow Control

P.W. Barth · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 72 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Modular concept for fluid handling systems. A demonstrator micro analysis system

T.S.J. Lammerink, V.L. Spiering, J.H.J. Fluitman et al. · 2002 · 44 citations · Full text

Engineering, Chemical Engineering, Actuators +10

An ISFET-based calcium sensor using a photopolymerized polysiloxane membrane

Albert van den Berg, A. Grisel, E. Verney-Norberg · Sensors and Actuators B Chemical · 1991 · 39 citations

Engineering, Bioengineering, Biomedical Engineering +14

THERMPNEUMATICALLY ACTUATED MICROVALVES AND INTEGRATED ELECTRO-FLUIDIC CIRCUITS

M.J. Zdeblick, Ryan Anderson, J. Jankowsi et al. · 1994 · 29 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +8