Concepedia

In situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thickness attainable with ellipsometry and photometry

Michael Vergöhl, N. Malkomes, Th. Matthée, Uwe Richter, F.-W. Nickol, John C. Bruch

Thin Solid Films · 2001 · 21 citations · 6 references

DOI

Concepts

References

6

Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering

J. Szczyrbowski, G. Teschner, A. Zmelty · Journal of Non-Crystalline Solids · 1997 · 68 citations

, , +15

Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering

Bernd Szyszka, Steffen Jäger · Journal of Non-Crystalline Solids · 1997 · 51 citations

, , +15

Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO 2 and SiO 2 films for process control

Michael Vergöhl, N. Malkomes, Thorsten Staedler et al. · Thin Solid Films · 1999 · 48 citations

, , +17

Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering

N. Malkomes, Michael Vergöhl, Bernd Szyszka · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 41 citations · Full text

, , +17

Mid frequency sputtering with TwinMag®-a survey of recent results

M. Ruske, J. Szczyrbowski, G. Teschner et al. · Vacuum · 1998 · 20 citations

, , +7