Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering

Transparent heat-reflecting coatings based on highly doped semiconductors

Gerhard Frank, E. Kauer, H. Köstlin · Thin Solid Films · 1981 · 222 citations

Semiconductors, Materials Science, Optical Materials +8

Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system

Klaus Köhler, D. E. Horne, J. W. Coburn · Journal of Applied Physics · 1985 · 178 citations

Engineering, Glow Discharge, Planar System +16

Window coatings for the future

Claes‐Göran Granqvist · Thin Solid Films · 1990 · 175 citations

Materials Science, Engineering, Thermal Barrier Coating +7

Conduction mechanism of highly conductive and transparent zinc oxide thin films prepared by magnetron sputtering

Tadatsugu Minami, Hirotaka Sato, K. Ohashi et al. · Journal of Crystal Growth · 1992 · 174 citations

Materials Science, Material Analysis, Engineering +8

Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films

K. Ellmer, F. Kudella, R. Mientus et al. · Thin Solid Films · 1994 · 99 citations

Materials Science, Materials Engineering, Electrical Engineering +10