Journal of Crystal Growth · 1992 · 174 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsThin FilmsOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsTransparent Conducting OxidesConductionConductivity In Thin FilmsMagnetron SputteringSputteringTransparent Conducting FilmsTransparent Conducting MaterialsTransparent Conductive FilmsZinc Oxides
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