Surface Science · 1976 · 135 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface ScienceOxide SemiconductorsSemiconductor InterfacesSemiconductor SurfacesSurface PhysicsSurface RoughnessSurface Roughness EffectsElectron ScatteringInterface Roughness ScatteringSilicon InterfacesSilicon PhysicsSilicon Surface ScienceSurface Roughness ParametersThin Film Surface Roughness
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