Electron scattering in silicon inversion layers by oxide and surface roughness - Concepedia

Concepedia

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Electron scattering in silicon inversion layers by oxide and surface roughness

135

Citations

6

References

1976

Year

A. Hartstein, T.H. Ning, A. B. Fowler

Surface Science

Surface CharacterizationElectron ScatteringEngineeringPhysicsSurface RoughnessSurface AnalysisSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorPlasma EtchingSilicon Inversion Layers

References

	Year	Citations

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