Thin Solid Films · 1983 · 37 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SolidsChemical Vapor DepositionSemiconductor Thin FilmsThin Film Mechanical PropertiesThin-film MaterialsAmorphous SiliconAmorphous Thin FilmsHydrogenated Amorphous SiliconPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionSilicon CarbideSilicon Carbide (Sic) Materials
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Hydrogen content of a variety of plasma-deposited silicon nitrides
Ray Chow, W. A. Lanford, Keming Wang et al. · Journal of Applied Physics · 1982 · 136 citations