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Silicon nitride at high deposition rate by Hot Wire Chemical Vapor Deposition as passivating and antireflection layer on multicrystalline silicon solar cells

Materials ScienceAntireflection LayerElectrical EngineeringEngineeringApplied PhysicsChemical DepositionChemical Vapor DepositionHigh Deposition RateCompound SemiconductorPhotovoltaicsSilicon On InsulatorSilicon Nitride