Thin Solid Films · 1987 · 43 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureMaterials CharacterizationMechanical Behavior Of MaterialsStrain AnalysisStrain HardeningStress-strain BehaviorThin Film StrainX-ray CrystallographyX-ray DiffractionNitride Thin FilmsNitrides Thin FilmsX-ray Diffraction AnalysisX-ray Diffraction Strain AnalysisX-ray Spectral Analysis
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