Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 146 citations · 0 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSemiconductor MaterialsSolid State PhysicsCrystal GrowthEpitaxial GrowthIii-v SemiconductorsOrder-disorder TransformationsOrdering TransformationsSemiconductor PhysicsAtomic OrderingAtomic Ordering KineticsEpitaxial Growth KineticsOrder-disorder Transformation KineticsOrdered AlloysOrdering KineticsOrdering PhenomenaVacancy Ordering
The phenomenon of spontaneous atomic scale ordering was first reported for semiconductor alloys only ∼5 years ago. Since that time, ordering has been observed in nearly all III/V alloy systems. This paper will describe the ordered structures observed, as well as the extent of ordering, in specific III/V alloys. The effects of ordering on the fundamental properties will be described briefly. The paper will emphasize a summary of our current understanding of the phenomenon. Both thermodynamic and kinetic factors play a role in determining the degree of order for specific epitaxial growth parameters and on which planes the compositional modulations occur.