Japanese Journal of Applied Physics · 1973 · 31 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsMetal Oxide NanomaterialsOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsNitride Thin FilmsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide LayersZinc Oxides