Thin film deposition profiles using a ballistic aggregation model

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

Simulation of structural anisotropy and void formation in amorphous thin films

Douglas Henderson, M. H. Brodsky, P. Chaudhari · Applied Physics Letters · 1974 · 195 citations

Natural Sciences, Materials Engineering, Materials Science +17

Monte Carlo calculation for structural modifications in ion-assisted thin film deposition due to thermal spikes

Karl‐Heinz Müller · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 119 citations

Natural Sciences, Materials Engineering, Materials Science +15

Fractal scaling in thin film condensation and material surfaces

Paul Meakin · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1986 · 113 citations

Natural Sciences, Materials Science, Physics +17

Evaporated film profiles over steps in substrates

I. A. Blech · Thin Solid Films · 1970 · 67 citations

Natural Sciences, Materials Science, Surface Engineering +10