Concepedia

Pulsed laser deposition of tungsten carbide thin films on silicon (100) substrate

Yoshiaki Suda, T. Nakazono, K. Ebihara, K. Baba

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 17 citations · 3 references

DOI

Concepts

References

3

VC, NbC and TaC with varying carbon content studied by ESCA

Lars Ramqvist, K. Hamrin, G. Johansson et al. · Journal of Physics and Chemistry of Solids · 1970 · 100 citations

, , +6

Diffusion barrier performance of pulsed laser deposited amorphous tungsten carbide films

Smita Ghaisas · Journal of Applied Physics · 1991 · 25 citations · Full text

, , +17

Heteroepitaxial Growth of Tungsten Carbide Films on W(110) by Plasma-Enhanced Chemical Vapor Deposition

Masahiro Katoh, Hiroshi Kawarada · Japanese Journal of Applied Physics · 1995 · 12 citations

, , +9