Thermolithographic Patterning of Sol−Gel Metal Oxides on Micro Hot Plate Sensing Arrays Using Organosilanes

Abstract

Sol-gel-derived SnO2 and Fe2O3 were selectively deposited on elements of micro hot plate (microHP) arrays. The silicon micromachined microHP arrays contain heating elements (100 microm x 100 microm) that are electronically addressable and thermally isolated from each other. Thin films of (tridecafluoro-1,1,2,2-tetrahydrooctyl)trichlorosilane (TFS) or hexyltrichlorosilane (HFS) assembled on surfaces of the arrays served as thermally sensitive resists whereby heating of specific microHPs resulted in removal of organosilane films only in heated areas. TFS-masked surfaces were characterized with condensation figures and secondary ion mass spectrometry (SIMS) imaging. TFS was removed from regions heated above 400 degrees C to expose hydrophilic surfaces, while TFS films in unheated areas were unaffected and remained hydrophobic. Sol-gel tin oxide spin-coated on the thermally patterned arrays adhered only to the hydrophilic regions and was repelled from the hydrophobic areas masked by the TFS films. By using HFS films, it was possible to selectively deposit two sol-gel materials, SnO2 and Fe2O3, on different microHPs in the same array as confirmed by SIMS imaging. Both materials showed varying degrees of electrical response to hydrogen and methanol in gas-sensing measurements.