Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

Steffen Jäger, Bernd Szyszka, J. Szczyrbowski · Surface and Coatings Technology · 1998 · 165 citations

Natural Sciences, Materials Engineering, Materials Science +13

Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering

Bernd Szyszka · Thin Solid Films · 1999 · 154 citations

Natural Sciences, Materials Engineering, Materials Science +14

Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering

Bernd Szyszka, Steffen Jäger · Journal of Non-Crystalline Solids · 1997 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +15

Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering

N. Malkomes, Michael Vergöhl, Bernd Szyszka · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 41 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Growth Mechanism of ZnO Film by Reactive Sputtering Method –Significance of Thermodynamics in a Plasma System–

Naoto Tsuji, Hiroshi Komiyama, Kazunobu Tanaka · Japanese Journal of Applied Physics · 1990 · 14 citations

Natural Sciences, Materials Science, Physics +17