Applied Physics A · 1985 · 384 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsOptoelectronicsSemiconductor MaterialsDefects In Electronic MaterialsDislocation TheoryDislocations In SemiconductorsOptical Properties Of SemiconductorsSemiconductor DefectsSilicon MaterialsDislocation PhysicsDislocationsPhotoluminescence
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Ar+ laser induced chemical vapor deposition of Si from SiH4
D. Bäuerle, Peter Irsigler, G. Leyendecker et al. · Applied Physics Letters · 1982 · 102 citations