Microsystem Technologies · 2013 · 21 citations · 18 references
EngineeringAerospace EngineeringMechanical EngineeringInstrumentationMicroelectromechanical SystemsSensorsElectrostatic ActuatorsMems ActuatorsMems DesignMems SensorsMicroelectromechanical SensorsMicromachiningAccelerometer SensorsAccelerometersElectrostatic MicroactuatorsExperimental Study DesignMicromachined Sensors
18
Electrostatically levitated spherical 3-axis accelerometer
Risaku Toda, N. Takeda, Takao Murakoshi et al. · 2003 · 59 citations
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P. W. McNamara · Space Science Reviews · 2009 · 52 citations